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The scope of this Specification is for one grade of n-butyl acetate used in the semiconductor industry
SEMI C3 — Specifications for Gases
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4 This Guide is designed to provide definitions for describing a more suitable measurement strategy for low stiffness wafers and geometries
C06500 - SEMI C65 - Guide for Trimethylsilane (3MS), 99.995% Quality Revision:SEMI C65-0308 - Superseded The scope of this SpecificationThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www. semiviews. org and www. semi. org in March 2017; originally published February 2008. The purpose of this Document is to provide a guide for trimethylsilane (3MS) used in the semiconductor industry. This Document covers guides for 3MS
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